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1

Sloped niobium etching using CF4 and O2

Sasserath, Jay N.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1990

Language:

english

File:

PDF, 769 KB

english, 1990

2

Low Temperature Silicon Nitride and Silicon Dioxide Film Processing by Inductively Coupled Plasma Chemical Vapor Deposition

Lee, J. W., Mackenzie, K. D., Johnson, D., Sasserath, J. N., Pearton, S. J., Ren, F.

Journal:

Journal of The Electrochemical Society

Year:

2000

Language:

english

File:

PDF, 549 KB

english, 2000

3

Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Lee, J. W., Mackenzie, K. D., Johnson, D., Pearton, S. J., Ren, F., Sasserath, J. N.

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.74 MB

english, 1999

4

[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - New contact process using soft etch for stable ohmic characteristics and its application to 0.1 micron CMOS devices

Sumi, H., Yanagida, T., Sugano, Y., Sasserath, J.N.

Year:

1994

Language:

english

File:

PDF, 334 KB

english, 1994

5

ChemInform Abstract: GaAs/InGaP Selective Etching in BCl3/SF6 High-Density Plasmas.

D. C. Hays, H. Cho, J. W. Lee, M. W. Devre, B. H. Reelfs, D. Johnson, J. N. Sasserath, L. C. Meyer, E. Toussaint, F. Ren, et al. et al.

Journal:

Year:

2000

File:

PDF, 32 KB

2000

6

ChemInform Abstract: 905 nm Wavelength Laser as a Means for in situ End-Point Detection of Dry Etching of AlxGa1-xAs on GaAs.

J. W. Lee, R. Westerman, K. D. Mackenzie, J. F. Donohue, D. Johnson, J. N. Sasserath, K. Liddane, S. J. Pearton

Journal:

Year:

2000

File:

PDF, 34 KB

2000

7

The effect of N2 plasma damage on AlGaAs/InGaAs/GaAs high electron mobility transistors. I. DC characteristics

V.P Trivedi, C.H Hsu, B Luo, X Cao, J.R LoRache, F Ren, S.J Pearton, C.R Abernathy, E Lambers, M Hoppe, C.S Wu, J Sasserath, J.W Lee, K Mackenzie

Journal:

Solid-State Electronics

Year:

2000

Language:

english

File:

PDF, 579 KB

english, 2000

8

Effects of N2 or Ar plasma exposure on GaAs/AlGaAs heterojunction bipolar transistors

C.H Hsu, C.C Chen, B Luo, F Ren, S.J Pearton, C.R Abernathy, J.W Lee, K.D Mackenzie, J Sasserath

Journal:

Solid-State Electronics

Year:

2001

Language:

english

File:

PDF, 303 KB

english, 2001

9

Understanding of etch mechanism and etch depth distribution in inductively coupled plasma etching of GaAs

J.W. Lee, M.H. Jeon, M. Devre, K.D. Mackenzie, D. Johnson, J.N. Sasserath, S.J. Pearton, F. Ren, R.J. Shul

Journal:

Solid-State Electronics

Year:

2001

Language:

english

File:

PDF, 295 KB

english, 2001

10

Comparison of the effects of H2 and D2 plasma exposure on GaAs MESFETs

B. Luo, F. Ren, K.P. Lee, S.J. Pearton, C.-S. Wu, D. Johnson, J.N. Sasserath

Journal:

Solid-State Electronics

Year:

2001

Language:

english

File:

PDF, 481 KB

english, 2001

11

Development of advanced plasma process with an optical emission spectroscopy-based end-point technique for etching of AlGaAs over GaAs in manufacture of heterojunction bipolar transistors

J.W. Lee, M.H. Jeon, G.S. Cho, H.C. Yim, S.K. Chang, K.K. Kim, M. Devre, D. Johnson, J.N. Sasserath, S.J. Pearton

Journal:

Solid-State Electronics

Year:

2002

Language:

english

File:

PDF, 127 KB

english, 2002

12

High selectivity Inductively Coupled Plasma etching of GaAs over InGaP

D.C Hays, H Cho, J.W Lee, M.W Devre, B.H Reelfs, D Johnson, J.N Sasserath, L.C Meyer, E Toussaint, F Ren, C.R Abernathy, S.J Pearton

Journal:

Applied Surface Science

Year:

2000

Language:

english

File:

PDF, 567 KB

english, 2000

13

Zur Kenntnis des Osmiums

Arthur Rosenheim, Edward A. Sasserath

Journal:

Zeitschrift für anorganische und allgemeine Chemie

Year:

1899

Language:

german

File:

PDF, 1.05 MB

german, 1899

14

Selective dry etching of InGaP over GaAs in inductively coupled plasmas

P. Leerungnawarat, H. Cho, D. C. Hays, J. W. Lee, M. W. Devre, B. H. Reelfs, D. Johnson, J. N. Sasserath, C. R. Abernathy, S. J. Pearton

Journal:

Journal of Electronic Materials

Year:

2000

Language:

english

File:

PDF, 222 KB

english, 2000

15

Marokkanisches „Olivenöl“

Journal:

European Food Research and Technology

Year:

1910

Language:

german

File:

PDF, 180 KB

german, 1910

16

Dry etching of niobium using CCl2F2 and CF4: A comparison

Sasserath, Jay N.

Journal:

Journal of Applied Physics

Year:

1990

Language:

english

File:

PDF, 862 KB

english, 1990

17

[IEEE [1991] GaAs IC Symposium Technical Digest - Monterey, CA, USA (20-23 Oct. 1991)] [1991] GaAs IC Symposium Technical Digest - Magnetron reactive ion etching for GaAs IC manufacturing technology

Namaroff, M., Sasserath, J., Meyyappan, M., McLane, G., Lee, H.S., Cole, M.W.

Year:

1991

File:

PDF, 308 KB

1991

18

Advanced selective dry etching of GaAs/AlGaAs in high density inductively coupled plasmas

Lee, J. W., Devre, M. W., Reelfs, B. H., Johnson, D., Sasserath, J. N., Clayton, F., Hays, D., Pearton, S. J.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 638 KB

english, 2000

19

Utilization of Optical Emission Spectroscopy for End-Point Detection during AlGaAs/GaAs and InGaP/GaAs Etching in BCl[sub 3]/N[sub 2] Inductively Coupled Plasmas

Lee, J. W., Jeon, M. H., Cho, G. S., Yim, H. C., Chang, S. K., Kim, K. K., Devre, M., Lee, Y. S., Westerman, R., Johnson, D., Sasserath, J. N., Pearton, S. J.

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 73 KB

english, 2001

20

Optimization of Contact Process with Monte Carlo Study for Advanced CMOS Devices

Sumi, Hirofumi, Yanagida, Toshiharu, Sugano, Yukiyasu, Ikeda, Yuji, Kishida, Satoru, Tokutaka, Heizo, Sasserath, Jay N.

Journal:

Japanese Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 121 KB

english, 1996

21

Low Damage Magnetron Reactive Ion Etching of GaAs

Mclane, G., Meyyappan, M., Cole, M. W., Lee, H. S., Lareau, R., Namaroff, M., Sasserath, J.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 320 KB

english, 1991

22

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Improved PVD TiW manufacturability using advanced chamber shield design

Sasserath, Jay N., Yenchik, Ron, Vasquez, Barbara, Kawasaki, Hisao

Year:

1994

Language:

english

File:

PDF, 329 KB

english, 1994

23

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V - New optical sensor for real-time in-situ end point monitoring during dry etching of III-V ternary multistack layers

Liddane, Kevin J., Toprac, Anthony J., Dang, Kim, Benferhat, Ramdane, Lee, Jewon, Westerman, Russell J., Johnson, David J., Donohue, John, Sasserath, Jay N., Pearton, Stephen J.

Year:

1999

Language:

english

File:

PDF, 535 KB

english, 1999

24

Facial twitches in patients after maxillofacial surgery: A case series

Grosjean, Laury, Van der Cruyssen, Fréderic, Van de Vyvere, Gaétan, Sasserath, Christophe, Schoenaers, Joseph, Politis, Constantinus

Journal:

Oral and Maxillofacial Surgery Cases

Year:

2017

Language:

english

File:

PDF, 181 KB

english, 2017

25

Buying Packaged Software? – Caveat Emptor!

Sasserath, J.D.

Journal:

Industrial Management & Data Systems

Year:

1990

Language:

english

File:

PDF, 214 KB

english, 1990

26

[ASME ASME 2003 1st International Conference on Microchannels and Minichannels - Rochester, New York, USA (April 24–25, 2003)] 1st International Conference on Microchannels and Minichannels - Direct Write Patterning of Microchannels

Fries, Carolyn, Fries, David, Broadbent, Heather, Steimle, George, Kaltenbacher, Eric, Sasserath, Jay

Year:

2003

Language:

english

File:

PDF, 380 KB

english, 2003

27

Multi-organ system for the evaluation of efficacy and off-target toxicity of anticancer therapeutics

McAleer, Christopher W., Long, Christopher J., Elbrecht, Daniel, Sasserath, Trevor, Bridges, L. Richard, Rumsey, John W., Martin, Candace, Schnepper, Mark, Wang, Ying, Schuler, Franz, Roth, Adrian B.,

Journal:

Science Translational Medicine

Year:

2019

Language:

english

File:

PDF, 2.75 MB

english, 2019

28

Multi-organ system for the evaluation of efficacy and off-target toxicity of anticancer therapeutics

McAleer, Christopher W., Long, Christopher J., Elbrecht, Daniel, Sasserath, Trevor, Bridges, L. Richard, Rumsey, John W., Martin, Candace, Schnepper, Mark, Wang, Ying, Schuler, Franz, Roth, Adrian B.,

Journal:

Science Translational Medicine

Year:

2019

File:

PDF, 2.75 MB

2019

29

Differential Monocyte Actuation in a ThreeâOrgan Functional Innate Immune SystemâonâaâChip

Sasserath, Trevor, Rumsey, John W., McAleer, Christopher W., Bridges, Lee Richard, Long, Christopher J., Elbrecht, Daniel, Schuler, Franz, Roth, Adrian, BertinettiâLaPatki, Christina, Shuler, Michae

Journal:

Advanced Science

Year:

2020

File:

PDF, 9.78 MB

2020

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